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UOU International

NAM, CHANG-WOO
NAM, CHANG-WOO
  • Appointment : Dean, Office of International Affairs
  • Positon : Professor
  • Phone : +82-52-259-2863
Profile
Nam, Chang-Woo / Professor
born in 1958 / BS, Yonsei Univ., MS, Univ of Florida , Ph.D., The Pennsylvania State Univ.
E-mail cwnam@ulsan.ac.kr
Tel +82-52-259-2863
Fax +82-52-259-1686
Research Fields RF maguetron sputtering process SAW device fabrication
Publications
1. Silicon Surface Electrical Properties after Low-temperature in situ cleaning using an Electon Cyclotron Resonance Plasma, J. of Vacuum Science and Technology. B 12(5), Sep. 1994.
2. Generation of Deep Levels in Silicon under Posthydrogen-Plasma Thermal Anneal, J. of Applied Physics, 77, Mar. 1995.
3. Thermal Anneal Activation of Defects in Hydrogen Plasma-treated Silicon, European Materials Research Society, Materials Sciene and Engineering B, 1995.

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Last Modified : Nov 25, 2015
  • Office : UOU International
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